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Download movie titat for mobile from Mp3Doubler HD Movies Links, Images,. Ek .1. Field of the Invention
The present invention relates to an apparatus and method for positioning a workpiece within a vacuum chamber and for processing the workpiece with a plasma. In particular, the present invention relates to an apparatus and method for positioning a workpiece within a vacuum chamber for processing a target portion of the workpiece, where the positioning of the workpiece within the vacuum chamber minimizes the effects of previous processing steps.
2. Description of the Prior Art
Apparatuses for processing workpieces within vacuum chambers are well known. For example, plasma etching, plasma CVD, and plasma sp 0b46394aab